High-resolution scanning thermal probe with servocontrolled interface circuit for microcalorimetry and other applications
نویسندگان
چکیده
منابع مشابه
Microcalorimetry applications of a surface micromachined bolometer-type thermal probe
This article describes a surface micromachined scanning thermal probe that uses polyimide as the structural material and an embedded thin film metal resistor as the sensing element. The typical dimensions of a fabricated probe are 350 mm in length, 50 mm in width, and 3–10 mm in thickness. The resistor and the scanning tip are formed by sputter-deposited films of nickel and tungsten, which prov...
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This paper reports on the detection of nano-scale chemical variations in photosensitive polymers using scanning thermal probes fabricated from polyimide and metal thin films on a silicon substrate. The high thermal insulation achieved by these probes permits the measurement of thermal conductance variations <10 W/K. The probes are mechanically very compliant, with a typical a measured spring co...
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This paper describes a thermal imaging system which includes a customized micromachined thermal probe and circuit interface for a scanning microscopy instrument. The probe shank is made from polyimide for mechanical compliance and high thermal isolation, and has a thin-film metal tip of ≈50 nm in diameter. The circuit provides closed-loop control of the tip temperature and also permits it to be...
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We report on the development of a new two-dimensional micropositioning device, or walker, which is capable of moving across very large distances (in principle unlimited) and with a very small step size (as small as 100 &step) in both directions. Based on a unique tracking design, the motion is extremely orthogonal with very little crosstalk between the two directions. Additionally, there is no ...
متن کاملDifferential scanning microcalorimetry
Differential scanning calorimetry (DSC) is an experimental technique to measure the heat energy uptake that takes place in a sample during controlled increase (or decrease) in temperature. At the simplest level it may be used to determine thermal transition (“melting”) temperatures for samples in solution, solid, or mixed phases (e.g. suspensions). But with more sensitive apparatus and more car...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2004
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.1711153